Precautions for use and routine maintenance of c406 magnetron sputtering equipmentC406磁控溅射设备使用及日常保养注意事项

C406磁控溅射台设备使用及日常保养注意事项

一、注意事项

（一）系统

1) 实验前勿忘通水。

2) 机械泵必须在开分子泵之前开，在分子泵关掉15分钟后再关机械泵。

3) 在开阀V3前，检查充气阀V4是否关闭。

4) 阀V3开启后，若有工作异常，应立即关闭阀V3，检查异常原因。

5) 只有在插板阀允许打开指示灯亮时，才允许开插板阀。若插板阀允许打开指示灯处于熄灭状态，插板阀不允许打开，若强行打开，则插板阀易损坏。

6) 开反应室之前，必须先关上插板阀，然后才能向反应室充气。

7) 当反应室充气完毕后，确信反应室内已处于大气状态，才可开始提升操作，否则易损坏升降系统。为防不测，提升时可先点动升按钮，开盖后再连续提升。

8) 关闭分子泵前，先关闭插板阀。

9) 当插板阀打开阻力过大时，请勿强行打开，以免损坏。

10) 在打开反应室放样片时，时间要尽可能短，以免反应室内长时间暴露大气。

11) 实验完毕后，要将反应室抽成真空，同时将管道内的残留气体抽净。

12) 实验结束后，将系统运转15分钟后再关闭，以便排净泵腔内的残留气体。

13) 因控制柜上有许多按压式电钮，注意工作中不要碰到控制柜上的按钮，以免发生误操作或断电现象。

14) 系统运转过程中，不要长时间离走，以免在发生特殊情况时，不能及时处理。

（二）分子泵

1) 严禁抽大气。

2) 在分子泵工作过程中不允许关机械泵。

（三）机械泵

1) 不能长时间抽大气。

2) 机械泵必须在开分子泵之前开，在分子泵关掉15 分钟后再关机械泵。

3) 在泵初次运转或在电网检修后，请注意泵的旋转方向。泵若发生反转，会导致机械泵的油反回到分子泵内，分子泵受到污染，严重时，分子泵需回原厂拆装清洗。

4) 排气管要通畅。

（四）真空计

1) 向反应室内充气或通反应气体，要先关掉真空计测量开关。

2) 对第一次使用的电阻规管，应进行“零点”和“满度”的校准。

3) 真空计电阻设定1 在出厂前已设定好（上限为3Pa），请勿更改设定 值，以免阀V3 及插板阀允许打开指示灯控制出错。导致真空系统损坏。

（五）射频电源

1) 射频电源在第一次开启时，需预热5 分钟。

2) 加载时，不要忘了开冷却水。

（六）流量计

1) 操作时最好是打开电源后，将阀控开关拨至“关闭”位，设定值调到“0”，再开气，预热到“0”点稳定后，再将阀控开关拨至“阀控”位，调流量至所需值。

2) 在操作阀控开关进行“清洗”后，不得直接转至“阀控”位工作，应先拨至“关闭”位，再转至“阀控”位。

3) 注意流量块的工作压差应控制在005MPa 至02MPa 之间。

二、日常维护保养

（一）真空系统

1) 长时间不工作，需经常抽真空，以保持有一个好的真空。

2) 一天工作完毕，需将管道内的残余气体抽净。

3) 清洗反应室

工作一天或工作一段时间后（依具体工作量而定），需清洗反应室。

（二）分子泵

1) 更换润滑油

分子泵运转时应保证润滑油液面处于规定位臵，以保证轴承的良好润滑。加油液面高度应至油标（红色标示带）上限。

建议在工作了3000小时或一年内更换一次润滑油。更换润滑油时，油池要清洗干净，加油时要保证清洁、无杂质灰尘。润滑油要使用专用的分子泵润滑油。

2) 分子泵清洗

建议在工作了6000小时或两年后回原厂拆装清洗。若不清洗并不影响分子泵工作，但泵力下降，将影响系统极限真空及抽速。

（三）机械泵

1) 检查

经常注意检查下列项目：

a. 真空泵的油量是否在两条油位指示线之间。

b. 真空泵油是否变色。

c. 有无异常噪声。

d. 是否有漏油现象。

e. 排气管内是否有存油，请定期清理，以保证排气通畅。

2) 换油周期

定期检查油位管内的油或通过放油口放出少量的油，观察泵油的变色、污染程度。如果出现严重污染，请及时更换泵油。建议12个月内更换一次真空泵油。

3) 换油

a打开放油阀，放出泵内的油，油排完后，关闭放油阀，空转5秒后，再停机，打开放油阀，放出从泵体内排出的油，关闭放油阀。

b油污染严重时，加入适当量的新油，运转数分钟，对泵体内部进行清洗，可根据油的污染情况，重复进行这样的操作。

c从加油口加入新的油，加到油面在两条油位线之间。

d请使用指定用油，ULVAC R7。

4) 拆洗

当泵内污染严重，影响极限真空，泵力严重下降，漏油等，需回原厂拆装清洗。

Precautions for use and daily maintenance of c406 magnetron sputtering table I. 

precautions (I) system 

1) do not forget to water before the experiment. 

2) The mechanical pump must be started before the molecular pump is started, and the mechanical pump shall be turned off 15 minutes after the molecular pump is turned off.

3) Before opening valve V3, check whether charging valve V4 is closed. 

4) After valve V3 is opened, if there is any abnormal operation, close valve V3 immediately and check the cause of the abnormal operation. 

5) It is only allowed to open the gate valve when the indicator light of the gate valve is on. If the plug-in valve is allowed to open and the indicator light is off, the plug-in valve is not allowed to open. If it is forced to open, the plug-in valve is easy to be damaged.

6) Before opening the reaction chamber, the plug-in valve must be closed before filling the reaction chamber. 

7) When the reaction chamber is inflated, the lifting operation can be started only when it is sure that the reaction chamber is in the atmospheric state, otherwise the lifting system will be easily damaged. In order to prevent accidents, the lifting button can be inched first, and then the lifting can be continued after the cover is opened. 

8) Close the gate valve before closing the molecular pump.

9) When the opening resistance of the gate valve is too large, do not open it forcibly to avoid damage. 

10) When opening the setting out sheet of the reaction chamber, the time should be as short as possible to prevent the reaction chamber from exposing the atmosphere for a long time. 

11) After the experiment, the reaction chamber should be vacuumized and the residual gas in the pipeline should be removed. 

12) At the end of the experiment, the system was operated for 15 minutes and then shut down in order to exhaust the residual gas in the pump cavity. 

13) Because there are many push buttons on the control cabinet, pay attention not to touch the buttons on the control cabinet in order to avoid misoperation or power failure. 

14) During the operation of the system, do not leave for a long time, so as not to handle in time in case of special circumstances.

（2） Molecular pump 

1) do not pump air. 

2) It is not allowed to turn off the mechanical pump during the operation of the molecular pump. 

（3） Mechanical pump 

 1) cannot pump air for a long time. 

 2) The mechanical pump must be started before the molecular pump is started, and the mechanical pump shall be turned off 15 minutes after the molecular pump is turned off.

 3) Please pay attention to the rotation direction of the pump after the initial operation of the pump or maintenance of the power grid. If the pump reverses, the oil of the mechanical pump will return to the molecular pump, which will be polluted. In serious cases, the molecular pump needs to be disassembled and cleaned in the original factory.

 4) The exhaust pipe shall be unobstructed. 

（4） Vacuum gauge 

1) when filling or passing reaction gas into the reaction chamber, turn off the vacuum gauge measuring switch first. 

2) For the resistance gauge used for the first time, the "zero point" and "full degree" shall be calibrated. 

3) The resistance setting 1 of vacuum gauge has been set before delivery (the upper limit is 3PA). Please do not change the setting value, so as to avoid the error of valve V3 and plug-in valve allowing to open the indicator light control. Damage to the vacuum system. 

（5） RF power supply 

1) when the RF power supply is turned on for the first time, it needs to be preheated for 5 minutes. 

2) Do not forget to turn on the cooling water when loading. 

（6） Flowmeter 

1) the best way to operate is to turn on the power, turn the valve control switch to the "off" position, set the value to "0", then turn on the gas, preheat to the "0" point and stabilize, then turn the valve control switch to the "valve control" position, and adjust the flow to the required value. 

2) After operating the valve control switch for "cleaning", it is not allowed to directly turn to the "valve control" position for work. First turn to the "close" position, and then turn to the "valve control" position. 

3) Note that the working pressure difference of flow block shall be controlled between 005mpa and 02mpa. 

2、 Routine maintenance (I) vacuum system

1) does not work for a long time, need to vacuumize regularly to maintain a good vacuum. 

2) After one day's work, the residual gas in the pipeline shall be pumped out. 

3) After cleaning the reaction chamber for a day or a period of time (depending on the specific workload), the reaction chamber needs to be cleaned. 

（2） Molecular pump 

1) when replacing the lubricating oil molecular pump, ensure that the lubricating oil level is at the specified position to ensure the good lubrication of the bearing. The oil level shall be up to the upper limit of the oil mark (red marking tape). It is recommended to change the lubricating oil once within 3000 hours or one year. When changing the lubricating oil, the oil pool shall be cleaned, and the oil shall be clean and free of impurities and dust. Special molecular pump lubricating oil shall be used for lubricating oil. 

2) It is recommended to return to the original factory for disassembly and cleaning after working for 6000 hours or two years. If it is not cleaned, it will not affect the operation of the molecular pump, but if the pump force drops, it will affect the limit vacuum and pumping speed of the system. 

（3） Mechanical pump 

1) check the following items frequently: A. check whether the oil volume of vacuum pump is between two oil level indication lines. b. Whether the vacuum pump oil changes color. c. Whether there is abnormal noise. d. Whether there is oil leakage. e. If there is any oil in the exhaust pipe, please clean it regularly to ensure smooth exhaust. 

2) Regularly check the oil in the oil level pipe or discharge a small amount of oil through the oil drain during the oil change cycle, and observe the discoloration and pollution degree of the pump oil. In case of serious pollution, please replace the pump oil in time. It is recommended to change the vacuum pump oil within 12 months. 

3) Oil change a: open the oil drain valve and drain the oil in the pump. After the oil is drained, close the oil drain valve. After idling for 5 seconds, shut down the pump, open the oil drain valve, drain the oil discharged from the pump and close the oil drain valve. B. when the oil pollution is serious, add the appropriate amount of new oil, operate for several minutes, clean the pump body, and repeat the operation according to the oil pollution. C add new oil from the oil filler, and add the oil level between the two oil level lines. D please use the specified oil, ULVAC R7. 

4) When the pump is disassembled and cleaned, it needs to be disassembled and cleaned back to the original factory because of the serious pollution in the pump, the impact on the limit vacuum, the serious drop of pump force, oil leakage, etc.