Name: Suzhou cycas Microelectronics Co., Ltd.
Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Precautions for maintenance of rapid annealing furnace
The fast annealing furnace takes the iodine tungsten lamp as the heating element, and the heating speed is extremely fast. The S-type thermocouple is used to measure the temperature and the international leading fuzzy PID control is adopted, which has a high temperature control accuracy of ＜± 5 ℃. The fast annealing furnace has a vacuum device, which can work in a variety of atmospheres. Just a small variety of annealing furnace.
Magnetron sputtering table
1. After the furnace is used for the first time or not for a long time, it shall be baked for 1 hour at 120 ℃ or 2 hours at 300 ℃ to avoid furnace cracking. The furnace temperature shall not exceed the rated temperature as far as possible to avoid damage to heating elements and furnace lining. It is forbidden to directly pour various liquids and dissolved metals into the furnace to keep the furnace clean.
2. If the furnace adopts quartz tube, when the temperature is higher than 1000 ℃, the high-temperature part of quartz tube will appear opaque phenomenon, which is called devitrification (also called devitrification), which is an inherent defect of continuous melting quartz tube, and it is a normal phenomenon.
3. When using the cold furnace, because the furnace is cold and needs a lot of heat absorption, the temperature rise rate in the low temperature section is not easy to be too fast, and the rise of each temperature section
The temperature rate difference is not easy to be too large. When setting the temperature rate, the physical and chemical properties of the sintered material should be fully considered to avoid the phenomenon of spraying material and polluting the furnace tube.
4. Regularly check whether the contact of the electrical connection part of the temperature control system is good, and pay special attention to whether the connection points of the heating elements are tight.
5. After the furnace has been used for a period of time, if the vacuum degree decreases, the temperature resistant silicon rubber ring between the stainless steel flange plates can be replaced, or the stainless steel flange plates can be reinstalled, or the vacuum system can be replaced and repaired to improve the overall vacuum degree of the system.
6. During the operation of the furnace, if the control deviation cannot be eliminated at about 300 ℃, the temperature display value is inconsistent with the value given by the program or the swing is too large, check whether the parameter "M5, P, t" is set accurately.
7. The furnace is suitable for the following working conditions:
(1) The ambient temperature is between - 10 ℃ and 75 ℃.
(2) The relative humidity of the surrounding environment shall not exceed 85%.
(3) There is no conductive dust, explosive gas and corrosive gas that seriously damages metal and insulating materials around the furnace.
(4) There is no obvious tilt, vibration and turbulence.