磁控溅射设备的主要用途Main uses of magnetron sputtering equipment

（1）各种功能性薄膜：如具有吸收、透射、反射、折射、偏光等作用的薄膜。例如，低温沉积氮化硅减反射膜，以提高太阳能电池的光电转换效率。

（2）装饰领域的应用，如各种全反射膜及半透明膜等，如手机外壳，鼠标等。

（3） 在微电子领域作为一种非热式镀膜技术，主要应用在化学气相沉积（CVD）或金属有机

（4）化学气相沉积（MOCVD）生长困难及不适用的材料薄膜沉积，而且可以获得大面积非常均匀的薄膜。

（5） 在光学领域：中频闭合场非平衡磁控溅射技术也已在光学薄膜（如增透膜）、低辐射玻璃和透明导电玻璃等方面得到应用。特别是透明导电玻璃目前广泛应用于平板显示器件、太阳能电池、微波与射频屏蔽装置与器件、传感器等。

（6）在机械加工行业中，表面功能膜、超硬膜，自润滑薄膜的表面沉积技术自问世以来得到长足发展，能有效的提高表面硬度、复合韧性、耐磨损性和抗高温化学稳定性能，从而大幅度地提高涂层产品的使用寿命。

磁控溅射除上述已被大量应用的领域，还在高温超导薄膜、铁电体薄膜、巨磁阻薄膜、薄膜发光材料、太阳能电池、记忆合金薄膜研究方面发挥重要作用。

(1) Various functional films: such as films with absorption, transmission, reflection, refraction, polarization and other functions. For example, silicon nitride antireflection films are deposited at low temperature to improve the photoelectric conversion efficiency of solar cells.

(2) Application in decoration field, such as all kinds of total reflection film and translucent film, such as mobile phone shell, mouse, etc.

(3) In the field of microelectronics, as a non thermal coating technology, it is mainly used in chemical vapor deposition (CVD) or metal organic

(4) Chemical vapor deposition (MOCVD) is difficult to grow and is not suitable for thin film deposition, and large area of very uniform thin film can be obtained.

(5) In the field of optics, if closed field unbalanced magnetron sputtering technology has also been applied to optical films (such as antireflective films), low radiation glass and transparent conductive glass. Especially transparent conductive glass is widely used in flat panel display devices, solar cells, microwave and RF shielding devices and devices, sensors, etc.

(6) In the mechanical processing industry, the surface functional film and super hard film, since the surface deposition technology of lubricating film has been developed rapidly since its inception, which can effectively improve the surface hardness, composite toughness, wear resistance and high temperature chemical stability, thus greatly improving the service life of coating products.

   In addition to the above-mentioned fields, magnetron sputtering has also played an important role in the research of high temperature superconducting thin films, ferroelectric thin films, giant magnetoresistance thin films, thin film luminescent materials, solar cells, and memory alloy thin films.