名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
Veeco RF350 IBE configuration information:
1.Veeco RF350 Ion milling tool (IBE)
2.Manual load
3.One etch chamber with 6'' configuration
4.Veeco 350 ion source with 12.5'' grids
5.Seren RF power supply
6.Maglev turbo pump
7.Neslab HX150 chiller