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名 称：苏州赛森电子科技有限公司
电 话：0512-58987901
传 真：0512-58987201
邮 箱：sales@cycas.com
地 址：江苏省张家港经济开发区福新路1202号 215600PRC
网 址：www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
EVG6200 mask aligner
EVG6200 mask aligner
所属分类：黄光Lithography
- 点击次数：
- 发布日期：2020/07/06
- 在线询价
详细介绍
EVG 6200 Automated double side mask aligner configuration information:
1.Vintage: 2010
2.Exposure modes: hard-, soft- and vacuum contact, proximity
3.1000W Light Source NUV
4.Optical set for wave length range 350-450nm
5.Lamp 1000W Hg?Alignment Stage and Microscopes:
6.Automatic alignment for top and / or bottom side
7.NanoAlign Technology Package incl. Cognex PatMax
8.Top side microscope: 5x
9.Bottom side microscope: 10x?
10.Mask holder for 9x9" masks with loading frame
11.Proximity wafer chuck for warped wafer 200mm
12.Robot module for autoload cassette to cassette
13.3 Ergo Load Cassette Station
