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名 称:苏州赛森电子科技有限公司

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Name: Suzhou cycas  Microelectronics Co., Ltd.

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Fax: 0512-58987201

Email: sales@cycas.com

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Suss ACS300+ coater/developer

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Suss ACS300+ coater/developer

  • 所属分类:黄光Lithography

  • 点击次数:
  • 发布日期:2020/07/06
  • 在线询价
详细介绍

Suss ACS300+ coater developer-3.jpg

Suss ACS300+ coater developer-2.jpg

Suss ACS300+ coater/developer configuration information:

1.wafer size:300mm

2.Vintage: 2005

3.4x FOUPs

4.2 coater modules(three resist lines)

5.2 developer modules(two developer lines)

6.4x Hotplates, 2x PI Hotplates, 3xCoolplates

7.Chemical supply cabinet with autoswitch

8.Missing hard drive, 3x Cybor resist pumps, 1x developer module spin motor


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