名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
Suss Gemma Developer Cluster System configuration information(1):
1.Vintage: 2014
2.Process Modules: 1 Spray Coater Process Module, 1 Hot / Cool / Vacuum Primer Plate Stack Module (2 Cool Plates + 2 Vacuum Primer Plates)
3.Configured for 150mm wafers (can be upgraded to 200mm)
4.AltaSpray Technology with Pre Wet Dispense Nozzle
5.Backside Rinse Option
6.Cool Plate with Proximity, Temperature Range: 20-25C (Qty: 2)
7.HMDS Vacuum Primer Plate, Temperature Range: 60-200C (Qty: 2)
8.Panel PC with Windows 7 OS
9.SECS/GEM Ready
10.Safety Interlocks for all Doors
11.Programmable User Levels
12.Single End Effector Robot
13.Optical Cassette Scanner
14.4x I/O Autosizing Open Cassette Platform R2-R8 (Stacked)
15.Optical Centering Station
16.Flow Detection Sensors
17.Media Storage Cabinet
Suss Gemma Developer Cluster System configuration information(2):
1.Vintage: 2015
2.4 Develop Process Modules + 1 Hot /Cool Plate Stack Module (4 Hot Plates + 3 Cool Plates)
3.Configured for 100mm and 150mm wafers (can be upgraded to 200mm)
4.Hot Plate with Proximity, Temperature Range: 60-250C (Qty: 4)
5.Cool Plate with Proximity, Temperature Range: 20-25C (Qty: 3)
6.Panel PC with Windows 7 OS
7.SECS/GEM Ready
8.Safety Interlocks for all Doors
9.Programmable User Levels
10.Single End Effector Robot
11.Optical Cassette Scanner
12.4x I/O Autosizing Open Cassette Platform R2-R8 (Stacked)
13.Optical Centering Station
14.Programmable Dispense Arms AQ (Qty: 4)
15.Puddle Dispense System AQ (Qty: 4)
16.Fan Spray Dispense System AQ (Qty: 4)
17.Topside Rinse Dispense AQ (Qty: 4)
18.BSR Rinse Nozzle, Flow Meter 250ml/min (Qty: 4)
19.Flow Detection Sensors
20.Media Storage Cabinet for up to two tanks (Qty: 2)