名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
GasonicsL3510 configuration information:
1.Configured for 6"silicon wafer processing
2.Heated platen with reflector and bulb
3.UV Igniter
4.Microwave generator with pressure and temp control system
5.Automatic photoemission end-point detection
6.Three gas inputs with MFC
7.Vacuum pump
8.High throughput and excellent uniformity