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名 称：苏州赛森电子科技有限公司
电 话：0512-58987901
传 真：0512-58987201
邮 箱：sales@cycas.com
地 址：江苏省张家港经济开发区福新路1202号 215600PRC
网 址：www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
张家港EVG Gemini Automated production Wafer Bond
张家港EVG Gemini Automated production Wafer Bond
所属分类：张家港黄光Lithography
- 点击次数：
- 发布日期：2020/07/06
- 在线询价
详细介绍
EVG Gemini Automated production configuration information：
1.Fully automated operation
2.Interlocked doors with signal light tower
3.4 Axis Industrial Robot
4.EVG CIM Framework Software GUI (Graphical User Interface)
5.Flexible process flow definition
6.Drag and drop recipe programming
7.Parallel processing of multiple jobs
8.Automated recording of process and machine parameters
9.Throughput optimized handling sequence
10.Password protected user access levels
11.Open cassette loading with empty/present sensor
12.Currently configured for 6" (150mm) wafers (4" and 8" optional with additional hardware)
13.Qty 8 bond chucks included for 6" wafers, additional chucks can be offered
14.SmartView?NT Alignment Module with 5x Objectives
15.4 Bond modules with up to 550°C and 10kN bond force
16.Formic Acid Bubbler option for purging formic acid vapor into bond chamber
17.1 purge gas line for process gas
18.CE Certified
19.All system documentation
