名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
Axcelis 8250 configuration information:
1.Vintage: 2000
2.Wafer size: 200mm
3.Loading configuration: SMIF
4.Sun Ultra work station
5.GEM/SECS interface with SECS II
6.Auto- wafer handling with buffer cassett
7.0-60 Deg auto tilt E-Chuck
8.Ion source type: ELS
9.Source material type: Moly
10.Vaporizer: Dual
11.Parallel beam using Hybrid Scanning
12.On-Board Cryos
13.Pfeiffer source pump/Beamline pump/End station pump
14.Gas configuration: BF3/PH3/AsH3/InCl3 with Unit-1662 MFC
15.CTI 9600 compressor
16.Dry pumps