名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
FEI865 dual beam configuration information:
1.Vintage:2002
2.S/N: 201275-11
3.Schottky FEG SEM
4.200V~30KV Accelerating Voltage
5.Chiller for E-column
6.Magnum ion beam column
7.30KV Accelerating Voltage
8.Milling current 1pA to 20nA
9.Specimen Stage: 200mm 5 axis motorized eucentric tilt stage
Loadlock 200mm,handle wafer piece up to 200mm full wafer
200mm wafer holder
10.Detector: In-lens SEC+BSE(Electron Beam)
Everhard-Thornley Scintillator Detecor
CDEM(Ion Beam)
11.User Interface: PC with Windows NT Operating System
12.Microscope software: XP version
13.GIS: Gas Injection System
1)Metal Deposition- PT
2)IEE – XeF2
3)I-Dep -TEOS
14.Vacuum System: Ion pumps for column
15.Turbo pumps for chamber
16.Dry roughing pump