唐山Suss Gemma Developer Cluster System

Suss Gemma Developer Cluster System configuration information（1）：

1.Vintage: 2014

2.Process Modules: 1 Spray Coater Process Module, 1 Hot / Cool / Vacuum Primer Plate Stack Module (2 Cool Plates + 2 Vacuum Primer Plates)

3.Configured for 150mm wafers (can be upgraded to 200mm)

4.AltaSpray Technology with Pre Wet Dispense Nozzle

5.Backside Rinse Option

6.Cool Plate with Proximity, Temperature Range:  20-25C (Qty: 2)

7.HMDS Vacuum Primer Plate, Temperature Range: 60-200C (Qty: 2)

8.Panel PC with Windows 7 OS

9.SECS/GEM Ready

10.Safety Interlocks for all Doors

11.Programmable User Levels

12.Single End Effector Robot

13.Optical Cassette Scanner

14.4x I/O Autosizing Open Cassette Platform R2-R8 (Stacked) 

15.Optical Centering Station 

16.Flow Detection Sensors

17.Media Storage Cabinet

Suss Gemma Developer Cluster System configuration information（2）:

1.Vintage: 2015

2.4 Develop Process Modules + 1 Hot /Cool Plate Stack Module (4 Hot Plates + 3 Cool Plates)

3.Configured for 100mm and 150mm wafers (can be upgraded to 200mm)

4.Hot Plate with Proximity, Temperature Range:  60-250C (Qty: 4)

5.Cool Plate with Proximity, Temperature Range:  20-25C (Qty: 3)

6.Panel PC with Windows 7 OS

7.SECS/GEM Ready

8.Safety Interlocks for all Doors

9.Programmable User Levels

10.Single End Effector Robot

11.Optical Cassette Scanner

12.4x  I/O Autosizing Open Cassette Platform R2-R8 (Stacked) 

13.Optical Centering Station 

14.Programmable Dispense Arms AQ (Qty: 4)

15.Puddle Dispense System AQ (Qty: 4)

16.Fan Spray Dispense System AQ (Qty: 4)

17.Topside Rinse Dispense AQ (Qty: 4)

18.BSR Rinse Nozzle, Flow Meter 250ml/min (Qty: 4)

19.Flow Detection Sensors

20.Media Storage Cabinet for up to two tanks (Qty: 2)