名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
KDF943i-3i435 configuration information:
1. Mainframe cables
2. Standard
(1)Loadlock Chamber
(2)Process Chamber
3. AC BOX
4. Safety Moudle
EMO Switch(2)
5.Operator interface
EMO Switch(1)
Touch monitor
Service Monitor Table
6. Chamber Base pressure-<5.0x10-7torr
7. 3/8"hose
8. Dry pump
9. Compressor
10. Target sorce