名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
MRC Eclipse Star sputtering system configuration information:
1.S/N:13658
2.Vintage:2008
3.Wafer size: 4''/5''/6''
4.-. RF Chamber: Soft etch
-. Sput1: Ti(RMX-10"" Cathode)
-. Sput2: Al(SPA-10"" Cathode)
-. Sput3: Ni(RMX-10"" Cathode)"
5.DC power supply
6.9600 compressor