名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
Nissin Exceed 3000AH medium current implanter configuration information:
1.Currently configured for 300mm wafer
2.S/N: F01653, F01655, F01659
3.Vintage: 2005
4.B+ 5-250keV, B++ -500keV
5.P+ 5-250keV, P++ -500keV
6.AS+ 5-180keV, As++ -400keV
7.In+ 10-120keV, In++ -400keV
8.Tile angle 0-60deg. twist angle 0-359 deg
9.Plasma Flood Gun(RF)