名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
GasonicsPEP3510 configuration information:
1.Main body set up for 8" wafer
2.SECS/GEM interface
3.2x Open cassette
4.Dual Blade Yaskawa Robot
5.Left/Right coolers
6.Left Module: PEP3510A/A(L)
7.Right Module: PEP3510A/A(R)
8.Quartz process kit
9.Standard Platen
10.MKS600 series Pressure controller
IBM Computer
Microwave Power supply: Astex(2000W)
2x Dry pumps