名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
EVG 6200 Automated double side mask aligner configuration information:
1.Vintage: 2010
2.Exposure modes: hard-, soft- and vacuum contact, proximity
3.1000W Light Source NUV
4.Optical set for wave length range 350-450nm
5.Lamp 1000W Hg?Alignment Stage and Microscopes:
6.Automatic alignment for top and / or bottom side
7.NanoAlign Technology Package incl. Cognex PatMax
8.Top side microscope: 5x
9.Bottom side microscope: 10x?
10.Mask holder for 9x9" masks with loading frame
11.Proximity wafer chuck for warped wafer 200mm
12.Robot module for autoload cassette to cassette
13.3 Ergo Load Cassette Station