名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
Lam 9600 configuration information:
1.configured 8" wafer
2.TCP Etch source for metal etching
3.DSQ Module for resist strip
4.ESC with He cooling
5.Edwards STP-H1000C Turbo pump
6.AE RFG1250 RF generator
7.Classic software
8.Optical End point detection
9.Gas lines with Unit MFC
10.BCl3 200sccm
11.Cl2 100sccm
12.N2 20 sccm
13.Ar 100sccm
14.BCl3 50sccm
15.O2 500sccm
16.CF4 100sccm
17.O2 2L
18.M&W Chiller
19.3x Ebara A30 Dry pumps