名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
Novellus C1-150 Electric CVD System configuration information:
1. Serial number: 9318-670
2. Year: 1993
3. Wafer size: 4 "15" 16 "
4. conveyor tire
5. process cavity
6. Process: silicon nitride, silicon oxide
7. MKS, adaptorr series pressure controller
8. RF source
9. dry pump