名称：苏州赛森电子科技有限公司

电话：0512-58987901

传真：0512-58987201

邮箱：sales@cycas.com

地址：江苏省张家港经济开发区福新路1202号 215600PRC

网址：www.cycas.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@cycas.com

Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.cycas.com

苏州ECLIPSE1

详细介绍

ECLIPSE1 configuration information:

1. Serial number:18625

2. Softwre Version:N/A

3. Wafer Size:125mm

4. Compressor:CTI8510

5. Controller Input voltages:208V/100A

6. Chamber: MFC

7. Power Supply:AE/Delta Master

8. RF Generator:MODEL-ACG-10B

9. DC power-AE/Delta Slave

10.Vacuum Pump

所属分类：苏州蒸发溅射台Evaporator sputter