名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区福新路1202号 215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
CHA Mark40 Evaporator Sputter configuration information:
1.CHA SR-10 power supply
2.ASC-CRYOGENICS 600 Cryo compressor
3.Pumps:
4.EBARA A10 vacuum pump
5.Cryo pump
6.Heater and heater power supply: 480V, 3 phase
7.Rotating dome
8.Currently tooled for 3"
9.2" dome with extra shields
10.6-pocket E-gun for metals (4 pockets being used – Ti, Cr, Ni, Au).