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名 称：苏州赛森电子科技有限公司
电 话：0512-58987901
传 真：0512-58987201
邮 箱：sales@cycas.com
地 址：江苏省张家港经济开发区福新路1202号 215600PRC
网 址：www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
昆山Axcelis 8250 medium current implanter
昆山Axcelis 8250 medium current implanter
所属分类：昆山注入机Implanter
- 点击次数：
- 发布日期：2020/07/06
- 在线询价
详细介绍
Axcelis 8250 configuration information：
1．Vintage: 2000
2．Wafer size: 200mm
3．Loading configuration: SMIF
4．Sun Ultra work station
5．GEM/SECS interface with SECS II
6．Auto- wafer handling with buffer cassett
7．0-60 Deg auto tilt E-Chuck
8．Ion source type: ELS
9．Source material type: Moly
10．Vaporizer: Dual
11．Parallel beam using Hybrid Scanning
12．On-Board Cryos
13．Pfeiffer source pump/Beamline pump/End station pump
14．Gas configuration: BF3/PH3/AsH3/InCl3 with Unit-1662 MFC
15．CTI 9600 compressor
16．Dry pumps
