名称：苏州赛森电子科技有限公司

电话：0512-58987901

传真：0512-58987201

邮箱：sales@cycas.com

地址：江苏省张家港经济开发区福新路1202号 215600PRC

网址：www.cycas.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@cycas.com

Address: No.1202,Fuxin Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.cycas.com

昆山Gasonics PEP3510 resist asher

详细介绍

GasonicsPEP3510 resist asher Main body set up for 8 'wafer configuration information：

1.S/N：M982090 and M982100

2.Vintage: 1998

3.SECS/GEM interface

4.2x Open cassette

5.Dual Blade Yaskawa Robot

6.Left/Right coolers

7.Left Module: PEP3510A/A(L)

8.Right Module: PEP3510A/A(R)

9.Quartz process kit

10.Standard Platen

11.MKS600 series Pressure controller

12.IBM Computer

13.Microwave Power supply: Astex(2000W)

14.2x Dry pumps

所属分类：昆山去胶机系列Resist Asher series