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Axcelis 8250 medium current implanter

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Axcelis 8250 medium current implanter

  • 所属分类:注入机Implanter

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  • 发布日期:2020/07/06
  • 在线询价
详细介绍


Axcelis 8250 configuration information:

  1.Vintage: 2000

 2.Wafer size: 200mm

 3.Loading configuration: SMIF

 4.Sun Ultra work station

 5.GEM/SECS interface with SECS II

 6.Auto- wafer handling with buffer cassett

 7.0-60 Deg auto tilt E-Chuck

 8.Ion source type: ELS

 9.Source material type: Moly

 10.Vaporizer: Dual

 11.Parallel beam using Hybrid Scanning

 12.On-Board Cryos

 13.Pfeiffer source pump/Beamline pump/End station pump

 14.Gas configuration: BF3/PH3/AsH3/InCl3 with Unit-1662 MFC

 15.CTI 9600 compressor

 16.Dry pumps

 


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