FEI865 dual beam

FEI865 dual beam configuration information:

1.Vintage：2002

2.S/N: 201275-11

3.Schottky FEG SEM

4.200V~30KV Accelerating Voltage

5.Chiller for E-column

6.Magnum ion beam column

7.30KV Accelerating Voltage

8.Milling current 1pA to 20nA

9.Specimen Stage: 200mm 5 axis motorized eucentric tilt stage

Loadlock 200mm,handle wafer piece up to 200mm full wafer

200mm wafer holder

10.Detector: In-lens SEC+BSE(Electron Beam)

Everhard-Thornley Scintillator Detecor

CDEM(Ion Beam)  

11.User Interface: PC with Windows NT Operating System

12.Microscope software: XP version

13.GIS: Gas Injection System

1)Metal Deposition- PT

2)IEE – XeF2

3)I-Dep -TEOS

14.Vacuum System: Ion pumps for column

15.Turbo pumps for chamber

16.Dry roughing pump