名 称:苏州赛森电子科技有限公司
电 话:0512-58987901
传 真:0512-58987201
邮 箱:sales@cycas.com
地 址:江苏省张家港经济开发区复兴路2号B06栋1楼215600PRC
网 址:www.cycas.com
Name: Suzhou cycas Microelectronics Co., Ltd.
Tel.: 0512-58987901
Fax: 0512-58987201
Email: sales@cycas.com
Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
Website: www.cycas.com
P5000 configuration information:
1.Main body with 2 chambers
2.Control rack
3.RF rack with 3 ENI OEM-12B generator
4.ATMI UniChem 3200 TEOS cabinet
5.2x AMAT heat exchangers
6.1x Neslab HX-150 Heat exchanger
7.PLIS
8.Turbo pump with controller
9.cables