名称：苏州赛森电子科技有限公司

电话：0512-58987901

传真：0512-58987201

邮箱：sales@cycas.com

地址：江苏省张家港经济开发区复兴路2号B06栋1楼215600PRC

网址：www.cycas.com

Name: Suzhou cycas Microelectronics Co., Ltd.

Tel.: 0512-58987901

Fax: 0512-58987201

Email: sales@cycas.com

Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC

Website: www.cycas.com

P5000

详细介绍

P5000

P5000 configuration information：

1.Main body with 2 chambers

2.Control rack

3.RF rack with 3 ENI OEM-12B generator

4.ATMI UniChem 3200 TEOS cabinet

5.2x AMAT heat exchangers

6.1x Neslab HX-150 Heat exchanger

7.PLIS

8.Turbo pump with controller

9.cables

所属分类：化学气相沉积chemical vapor deposition