Principle of etching process蚀刻工艺的原理

蚀刻工艺的原理

从专业意义上讲蚀刻的原理是专指金属按照设计和工艺要求，通过专业的蚀刻机所进行的一种受控腐蚀行为。通过这种受控化学加工，可以满足某些特定场合的设计要求，而这些要求是传统机械加工方法所不能达到的。金属化学腐蚀，在更多场合所指的都足金属在自然环境中的化学破坏所造成的化学损失所以被广泛接受的金属腐蚀的定义是:金属与周围环境介质接触，并与之发生化学或电化学作用而引起的破坏、变质所导致的金属化学损失行为。从这个定义上讲，金属的各种腐蚀其实就是金属的化学损失。对于金属化学损失的语言表述，流行的主要有:化学腐蚀、化学蚀刻、化学铣切及化学纹理蚀刻等四种。关于这四种表述可从以下几方面理解：

1. 化学腐蚀: 化学腐蚀是一种金属化学损失的普遍现象和过程，包括了平时常说的金属在各种腐蚀环境中的破坏腐蚀，同时也包括使用化学方法进行受控加工的腐蚀。从整个过程来看，它既包括了无控腐蚀也包括了可控蚀刻，是金属化学损失的总称，是金属在各种化学腐蚀介质中的一种化学损失行为。

2. 化学蚀刻: 化学蚀刻是很有针对性的，是令指受控腐蚀，是金属通过化学方法进 行一种可以控制的加工方法D化学蚀刻根据被蚀刻后的表面效果及加X要求又可分为化 学铣切和化学纹理蚀刻。

3. 化学铣切: 化学铣切具有和机械铣切相同的意义，只是采用加工的方法不同而已。化学铣切要求经化学蚀刻后的表面，有尽可能高的表面平滑度，尽可能低的表面粗植度，以及尽可能高的蚀刻精度。

4. 化学纹理蚀刻: 化学纹理蚀刻是指经化 学蚀刻后的表面，呈现出具有一定粗糙度的表面效果，且这种粗糙度的大小可以通对工艺过程的化学指标和物理指标的控制在一定范围内可调。这呰化学指标包括:所用腐蚀剂的种类及相互之间的浓度配比;物现指标包括:蚀刻温度、蚀刻时间和蚀刻方法。

                                                                          Principle of etching process

In a professional sense, the principle of etching refers to a kind of controlled corrosion behavior of metal through a professional etching machine in accordance with the design and process requirements. Through this kind of controlled chemical processing, the design requirements of some specific occasions can be met, and these requirements cannot be achieved by traditional mechanical processing methods. Metal chemical corrosion, in more occasions, refers to the chemical loss caused by the chemical damage of metal in the natural environment. Therefore, the widely accepted definition of metal corrosion is: metal is in contact with the surrounding environment and chemically or The behavior of metal chemical loss caused by damage and deterioration caused by electrochemical action. From this definition, all kinds of metal corrosion are actually the chemical loss of metal. For the language expression of metal chemical loss, there are mainly four popular ones: chemical corrosion, chemical etching, chemical milling and chemical texture etching. The four expressions can be understood from the following aspects:

1. Chemical corrosion: Chemical corrosion is a common phenomenon and process of metal chemical loss. It includes the usual destructive corrosion of metals in various corrosive environments, as well as the corrosion of controlled processing using chemical methods. From the perspective of the whole process, it includes both uncontrolled corrosion and controlled etching. It is a general term for metal chemical loss and a chemical loss behavior of metal in various chemical corrosion media.

   
   

2. Chemical etching: Chemical etching is very targeted. It refers to controlled corrosion. It is a controllable processing method for metals through chemical methods. D Chemical etching can be based on the surface effect after being etched and the requirements of adding X. Divided into chemical milling and chemical texture etching.

   
   

3.  Chemical milling: Chemical milling has the same meaning as mechanical milling, but the processing method is different. Chemical milling requires the chemically etched surface to have the highest possible surface smoothness, the lowest possible surface roughness, and the highest possible etching accuracy.

   
   

4. Chemical texture etching: Chemical texture etching refers to the surface after chemical etching, showing a surface effect with a certain roughness, and the size of this roughness can be controlled by the chemical and physical indicators of the process. Adjustable within the range. The chemical indicators include: the type of etchant used and the concentration ratio between each other; physical indicators include: etching temperature, etching time and etching method.