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等离子体表面处理的原理Principle of plasma surface treatment

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等离子体表面处理的原理Principle of plasma surface treatment

发布日期:2020-05-26 作者: 点击:

等离子体表面处理的原理

TIM图片20200526161554.png

      等离子,即物质的第四态,是由部分电子被剥夺后的原子以及原子被电离后产生的正负电子组成的离子化气状物质。它的能量范围比气态、液态、固态物质都高,存在具有一定能量分布的电子、离子和中性粒子,在与材料表面的撞击时会将自己的能量传递给材料表面的分子和原子,产生一系列物理和化学过程。其作用在物体表面可以实现物体的超洁净清洗、物体表面活化、蚀刻、精整以及等离子表面涂覆。


   (1)对材料表面的刻蚀作用

物理作用等离子体中的大量离子、百激収态分子、自由基等多种活性粒子,作用到固体样品表面,清除了表面原有的污度染物和杂质,而且会产生刻蚀作用,将样品表面变粗糙,形成许多微细坑洼,增大了样知品的比表面。提高固体表面的润湿性能。

   (2)激活键能,交联作用

等离道子体中的粒子能量在 0~20eV,而聚合物中大部分的键能在 0~10eV,因此等离子体作用到固体表面后,可以将固体表面的原有的化学键产生断裂,等离子体中的自由基中的这些键形成网状的交联结构,大大地激活了表面活性。

   (3)形成新的官能团

化学作用如果放电气体中引入反应回性气体,那么在活化的材料表面会发生复杂的化学反应,引入新的官能团,如烃基、氨基、羧基等,这些官能团都是活性基团,能明显提高答材料表面活性。

                                                                Principle of plasma surface treatment

     Plasma, the fourth state of matter, is an ionized gaseous substance composed of the atoms deprived of some electrons and the positive and negative electrons produced after the atoms are ionized. Its energy range is higher than that of gaseous, liquid and solid materials. There are electrons, ions and neutral particles with certain energy distribution. When they collide with the material surface, they will transfer their energy to the molecules and atoms on the material surface, resulting in a series of physical and chemical processes. It can achieve super clean cleaning, surface activation, etching, finishing and plasma coating on the surface of the object.


    (1) The physical effect of etching on the surface of the material: 

         A large number of active particles such as ions, excited molecules, free radicals, etc. in the plasma act on the surface of the solid sample, remove the original contamination and impurities on the surface, and produce etching effect, roughen the surface of the sample, form many micro pits, and increase the specific surface of the sample. Improve the wettability of solid surface.

    (2) Activation of bond energy, cross-linking, etc. 

        The particle energy in the ionomer is 0-20ev, while most of the bond energy in the polymer is 0-10ev. Therefore, when the plasma acts on the solid surface, the original chemical bonds on the solid surface can be broken. These bonds in the free radicals in the plasma form a network of cross-linking structure, greatly activating the surface activity. 

   (3) The formation of new functional groups. 

        If reactive gas is introduced into the discharge gas, complex chemical reactions will occur on the surface of the activated materials. The introduction of new functional groups, such as hydrocarbon, amino, carboxyl, etc., are all active groups, which can significantly improve the surface activity of the materials. 

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