Name: Suzhou cycas Microelectronics Co., Ltd.
Address: 1st floor,B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone,Jiangsu Province 215600PRC
频率选择：频率越高，氧越易电离形成等离子体。频率太高，以至电子振幅比其平均自由程还短，则电子与气体分子碰撞几率反而减少，使电离率降低。一般常用频率为 13.56MHz及2.45GHZ 。
Influencing factors of microwave plasma dry degumming machine:
Frequency selection: the higher the frequency is, the easier oxygen is ionized to form plasma. If the frequency is so high that the amplitude of the electron is shorter than its average free path, the probability of collision between the electron and the gas molecule will be reduced, and the ionization rate will be reduced. Generally, the commonly used frequencies are 13.56MHz and 2.45GHz.
Power effect: for a certain amount of gas, the power is high, the density of the active particles in the plasma is high, and the degumming speed is fast; however, when the power increases to a certain value, the active ions consumed by the reaction reach saturation, and the degumming speed does not increase significantly when the power is higher. Because of the high power and substrate temperature, the power should be adjusted according to the process requirements.
Selection of vacuum degree: if the vacuum degree is properly increased, the average free path of electron motion will be enlarged, so the energy obtained from the electric field will be larger, which is favorable for ionization. In addition, when the oxygen flow rate is constant, the higher the vacuum degree is, the larger the relative proportion of oxygen is, and the greater the concentration of active particles is. However, if the vacuum is too high, the concentration of active particles will decrease.
The influence of oxygen flow rate: large oxygen flow rate, high density of active particles, faster degumming rate; but too large flow rate, the probability of ion recombination increases, the average free path of electron motion shortens, and the ionization intensity decreases. If the pressure of the reaction chamber and the flow rate of the microwave plasma degummer are constant, the amount of gas pumped out will also increase, and the amount of active particles that have not participated in the reaction will also increase, so the effect of the flow rate increase on the degumming rate is not obvious.