蚀刻机喷头的作用及维护Function and maintenance of etcher nozzle

　　1.蚀刻机喷头的介绍：

蚀刻机喷头是蚀刻机喷淋装置中最重要的一个部件，药液喷淋的形状是根据蚀刻机喷头的种类来决定的，不同的蚀刻机喷头所起到的作用是不一样的。蚀刻机喷头

　　2.蚀刻机喷头的作用：

主要作用是把蚀刻液均匀的喷淋到工件上，蚀刻机喷头根据蚀刻机每道工序所对应的要求所选择不同的种类。比如：常规情况下蚀刻段选择用扇形，因为蚀刻段对压力的要求比较高，而我们扇形喷嘴喷淋出的液体压力会相对较高;显影段和退膜段我们就采用锥形喷嘴，因为这两处需要覆盖面广，而锥形喷嘴刚好就有这种特性。

扇形喷嘴：扇形喷嘴喷雾     锥形喷嘴：锥形喷嘴喷雾

　　3.蚀刻机喷头的维护：

蚀刻液是通过蚀刻机喷头顶端的小孔把药水给喷淋出来，这个小孔的直径是很小的，所以是很容易堵塞的，而我们的蚀刻液沉淀物和腐蚀下来的残渣都是颗粒状的，使用的时间过长了这些固体颗粒物的形成就会堵塞喷头，所以我们需要定期的清理等离子刻蚀机的喷头才能达到良好的腐蚀效果。

堵塞后的喷嘴：喷嘴堵塞

1. Introduction of etching machine nozzle: 

   The etching machine nozzle is the most important part of the etching machine spray device. The shape of liquid medicine spray is determined by the type of etching machine nozzle. Different etching machine nozzles play different roles.

    Etching machine nozzle 

2. the function of etching machine nozzle: 

   the main function is to spray the etching liquid evenly on the workpiece. The etching machine nozzle can select different types according to the corresponding requirements of each process of the etching machine. For example: in general, the sector is selected for etching section, because the pressure requirements of etching section are relatively high, and the liquid pressure sprayed by our sector nozzle will be relatively high; in developing section and film withdrawing section, we use the conical nozzle, because these two parts need wide coverage, and the conical nozzle just has this characteristic. Fan nozzle: fan nozzle spray cone nozzle: conical nozzle spray

3.  Maintenance of the etching machine nozzle:

   The etching liquid sprays the liquid medicine through the small hole on the top of the etching machine nozzle. The diameter of the small hole is very small, so it is easy to block. Our etching liquid sediment and corrosion residue are granular, and the formation of these solid particles will block the nozzle if the use time is too long, so we need to regularly Cleaning the spray head of plasma etching machine can achieve good corrosion effect. Blocked nozzle: blocked nozzle