2018 Chinese semiconductor material and equipment industry development conference held2018中国半导体材料及设备产业发展大会举行

     导语：2018中国半导体材料及设备产业发展大会日前在北京举行。大会由中国电子信息产业发展研究院主办、邳州市政府协办，旨在通过梳理半导体产业的发展方向、推介半导体材料及设备产业的创新理念，共同促进半导体产业生态环境的构建，推动我国集成电路产业的健康发展。

　  2018中国半导体材料及设备产业发展大会日前在北京举行。大会由中国电子信息产业发展研究院主办、邳州市政府协办，旨在通过梳理半导体产业的发展方向、推介半导体材料及设备产业的创新理念，共同促进半导体产业生态环境的构建，推动我国集成电路产业的健康发展。

　　中国电子信息产业发展研究院总工程师乌宝贵表示，半导体设备和材料作为整个产业链的上游环节，对整个行业的发展都起着至关重要的支撑作用。在半导体行业中有一种说法，叫做“一代器件、一代工艺、一代材料与设备”。特别是当整个行业进入纳米时代以后，微纳制造技术更多地依靠引入新材料和微观加工设备的加工能力来实现技术突破，更加注重通过材料和设备与工艺的全产业链深度合作来实现产业技术的更新换代，也就更加突显出了材料与设备的战略性和基础性作用。然而，国产设备与材料产业相对滞后于市场的发展需求，正在制约我国整个产业的进一步发展。如何解决行业内仍然存在的问题，促进设备与材料产业的健康发展，将是今后我们工作里的重中之重。

　　江苏省邳州市委书记陈静表示，邳州积极抢抓机遇，大力实施“工业立市、产业强市”战略，聚力产业创新，聚焦生态富民，主攻高端的半导体、智慧的机器人、循环的产业链。半导体产业作为国家战略性新兴产业，是全球战略竞争新的制高点。坚持用高端产业“虹吸”高端人才、以高端人才助推高端产业，把发展半导体材料和设备产业作为主攻方向，建成欧洲半导体海归人才创业园，设立苏北首家诺贝尔奖得主工作室，成立中国光刻技术研究中心、中国半导体科技创新中心、中科院微电子研究所徐州研修院等“国字号”科研平台，培育引进诺贝尔奖得主2人;正以博康信息、影速光电、上达电子华光激光、鲁汶仪器为龙头，全力打造光刻材料基地、生产测试设备基地、显示材料生产基地、晶圆制造和外延基地，加快推进中国电子智能小镇建设，半导体电子材料和设备产业基地成功获批国家火炬特色产业基地。

　　中国半导体行业协会副理事长于燮康表示，半导体制造是所有制造业里最为复杂，最有科技含量的行业之一，其产业链非常长，流程十分复杂，要经过电子硅、拉制单晶、切割单晶、切磨抛制取晶圆、光刻、蚀刻、离子注入、金属沉积、金属层、互连、清洗、晶圆测试与分割、核心封装、分级测试等200余个步骤;在生产和封测中，需要光刻机、刻蚀机、减薄机、划片机、引线键合机、倒装机、塑封机、切筋打弯等封造设备的辅助。正是由于半导体制造与传统制造不同：不可修复、流程复杂、制作周期长、机器精度高、持续投入强度高，营运成本高、运作系统复杂，因此发展半导体产业要强调整个团队的互动合作。

　　中科院微电子所副总工程师赵超在会上介绍了中国集成电路产业定位与发展战略，工业和信息化部赛迪智库集成电路研究所副所长林雨从四个维度分析了我国半导体产业发展趋势，中国电子科技集团公司第四十五研究所集团首席专家柳滨介绍了“国内半导体设备发展驱动因素及选择”，中国电子专用设备工业协会副秘书长金存忠发表了“中国大陆半导体设备现状与展望”的演讲。

       Introduction: 2018 Chinese semiconductor materials and equipment industry development conference was held in Beijing recently. The conference, sponsored by China Institute of electronic information industry development and co organized by Pizhou municipal government, aims to promote the construction of the ecological environment of semiconductor industry and the healthy development of China's integrated circuit industry by combing the development direction of semiconductor industry, promoting the innovation concept of semiconductor material and equipment industry. 

       The 2018 China semiconductor materials and equipment industry development conference was held in Beijing recently. The conference, sponsored by China Institute of electronic information industry development and co organized by Pizhou municipal government, aims to promote the construction of the ecological environment of semiconductor industry and the healthy development of China's integrated circuit industry by combing the development direction of semiconductor industry, promoting the innovation concept of semiconductor material and equipment industry. 

     Wu precious, chief engineer of China Electronic Information Industry Development Research Institute, said that as the upstream link of the whole industrial chain, semiconductor equipment and materials play a crucial supporting role in the development of the whole industry. In the semiconductor industry, there is a saying called "generation devices, generation processes, generation materials and equipment". Especially when the whole industry enters the nano era, micro nano manufacturing technology relies more on the introduction of new materials and micro processing equipment to achieve technological breakthroughs, and more attention is paid to the deep cooperation of the whole industrial chain of materials, equipment and technology to achieve the new generation of industrial technology, which highlights the strategic and fundamental role of materials and equipment. However, the domestic equipment and material industry lags behind the market demand, which is restricting the further development of the whole industry in China. How to solve the problems still existing in the industry and promote the healthy development of the equipment and material industry will be the top priority of our work in the future. 

    Chen Jing, Secretary of the CPC Committee of Pizhou City, Jiangsu Province, said that Pizhou actively seized the opportunity, vigorously implemented the strategy of "building a city by industry and strengthening the city by industry", concentrated on industrial innovation, focused on Ecological prosperity, and focused on high-end semiconductor, intelligent robot and circular industrial chain. As a national strategic emerging industry, semiconductor industry is a new commanding point of global strategic competition. Adhere to "siphon" high-end talents with high-end industries, boost high-end industries with high-end talents, take the development of semiconductor materials and equipment industry as the main direction, build a European semiconductor returnees talent entrepreneurship Park, set up the first Nobel Prize winning studio in Northern Jiangsu, establish China photolithography technology research center, China Semiconductor Technology Innovation center, and Xuzhou Research Institute of microelectronics, Chinese Academy of Sciences Xiuyuan and other "national brand" scientific research platforms have cultivated and introduced two Nobel Prize winners; Taking Bokang information, shadow speed optoelectronics, Shangda electronic Huaguang laser and Luwen instrument as the leaders, we are striving to build a base of photolithography materials, production and testing equipment, display materials, wafer manufacturing and extension, accelerate the construction of China's electronic intelligent Town, and the semi conducting electronic materials and equipment industrial base has been approved as the national torch characteristic industrial base. 

     Xie Kang, deputy director general of China Semiconductor Industry Association, said that semiconductor manufacturing is one of the most complex and technological industries in all manufacturing industries. Its industry chain is very long and its process is very complex. It needs to go through electronic silicon, drawing single crystal, cutting single crystal, cutting and polishing to make wafer, photolithography, etching, ion implantation, metal deposition, metal layer, interconnection, cleaning, wafer There are more than 200 steps such as test and segmentation, core packaging, grading testing, etc.; in production and sealing testing, it needs the assistance of photolithography machine, etching machine, thinning machine, dicing machine, lead bonding machine, inversion machine, plastic sealing machine, rib cutting bending and other sealing equipment. It is precisely because semiconductor manufacturing is different from traditional manufacturing: non repairable, complex process, long production cycle, high machine precision, high continuous input intensity, high operating cost and complex operating system, so the development of semiconductor industry should emphasize the interaction and cooperation of the whole team. 

    Zhao Chao, deputy chief engineer of the Institute of microelectronics, Chinese Academy of Sciences, introduced the positioning and development strategy of China's integrated circuit industry. Lin Yu, deputy director of the Institute of integrated circuits, CCID think tank, Ministry of industry and information technology, analyzed the development trend of China's semiconductor industry from four dimensions. Liu Bin, chief expert of the 45th Research Institute Group of China Electronics Technology Group, introduced "development of domestic semiconductor equipment" Exhibition driving factors and selection ", Jin Cunzhong, Deputy Secretary General of China Electronics Industry Association, delivered a speech on" current situation and Prospect of semiconductor equipment in mainland China ".